Microelectronics - One of the most challenging technologies
Our services
- Comprehensive Consulting and Design
- Engineering (MEP)
- Layout design
- Supervision and control
Clean Room Design / Clean Room Technology
- Clean room classes ISO 1 – 9
- Temperature stability < ± 0.1 K
- Dry-rooms < 1% rel. humidity
Ultra-Pure Media
- DI-water production and -supply
- Ultra-pure vapour, ultra-pure compressed air, ultra-pure gases
- Ultra-pure chemical supply
- Process gases, process cooling water supply
- Gas detection, leak detection
- Process waste water treatment / neutralisation
- Waste-air and exhaust-gas treatment
- Safety-management
- Layout design
- Equipment hook-up
- Fit-up
- Supervision and control
- Feasibility studies